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    Talks 1-20 21-40 41-60 61-80 81-100 101-126

     

    1. P. Lazzeri, G.W. Rubloff, M. Anderle, M. Bersani, R.M. Briber, Z. Lin, R.D. Miller, J.J. Park, and L. Vanzetti, “ToF-SIMS Study of PMSSQ Polymerization and Kinetics for the Manufacturing of Nanoporous Low-K Dielectrics“; 2003 International Interconnect Technology Conference (IITC 2003), San Francisco, USA, 2-4 June, 2003,

    2. T.Toccoli, A. Pallaoro, N. Coppedè, S. Iannotta,E. Barborini, P. Milani, A.M. Taurino, P. Siciliano, E. Iacob and M. Anderle, “Nanostructures by assembling clusters and molecules from supersonic beams: A novel approach for gas sensing devices“; E-MRS 2003 Spring Meeting, Strasbourg, June 10-13, 2003.

    3. E. Iacob, M. Anderle, M. Bersani, N. Coppedè, P. Lazzeri, V. Micheli, A. Pallaoro, T. Toccoli and S. Iannotta, “Morphology structure and interfaces in the preparation of films by SUMBE for gas sensing“; E-MRS 2003 Spring Meeting, Strasbourg, June 10-13, 2003.

    4. G. Gottardi, N. Laidani, M. Anderle, R.S. Brusa, M. Spagolla, “Structure and bonding studies of a-C:H films produced by plasma enhanced CVD using CH4-CO2 mixtures“; 16th International Symposium on Plasma Chemistry (ISPC-16), Taormina, Italy, June 22-27, 2003.

    5. M. Barozzi, D. Giubertoni, M. Anderle and M. Bersani, “Arsenic shallow depth profiling: accurate quantification in SiO2/Si stack”; The 14th International Conference on Secondary Ion Mass Spectrometry (SIMS XIV), San Diego, (CA), USA, September 14-19, 2003

    6. M. Barozzi, D. Giubertoni, M. Sbetti, M. Anderle and M. Bersani, “Sample holder implement for very small samples on SC-Ultra SIMS instrument”; The 14th International Conference on Secondary Ion Mass Spectrometry (SIMS XIV), San Diego, (CA), USA, September 14-19, 2003

    7. M. Barozzi, D. Giubertoni, M. Anderle and M. Bersani, “Short-term and long-term repeatability for Cameca SC-Ultra SIMS measurements”; The 14th International Conference on Secondary Ion Mass Spectrometry (SIMS XIV), San Diego, (CA), USA, September 14-19, 2003

    8. P. Lazzeri, J.J. Park, Z. Lin, G.W. Rubloff, R.M. Briber, R.D. Miller, L. Vanzetti, M. Anderle, M. Bersani, “Processing, and Characterization of PMSSQ-Based Materials for Nanoporous Low-K Dielectrics”; AVS 50th International Symposium, Baltimore, MD, November 2-7, 2003.

    9. C. Pederzolli, L. Lunelli, G. Speranza, P. Villani, L. Pasquardini, R. Canteri, M. Anderle, J.J.Park, Li-Qun Wu, Hyunmin Yi, Sheng Lie, R. Ghodssi, W. E. Bentley, G. F Payne, G. W. Rubloff, “Materials and surface characterization of electrodeposited polysaccharide chitosan film as a platform for biomolecular reactions in bioMEMS systems”;AVS 50th International Symposium, Baltimore, MD November 2-7, 2003.

    10. G. Speranza, C. Pederzolli, M. Vinante, L. Lunelli, R. Canteri, M. Fedrizzi, and M. Anderle, “Physico-chemical and biological characterization of deposited polysaccharide chitosan films”; IVC-16/ICSS-12/NANO-8, Venice, Italy, June 28 – July 2, 2004

    11. G. Speranza, C. Pederzolli, M. Vinante, L. Lunelli, R. Canteri, L. Pasquardini, J. J. Park, G. F. Payne, G. W. Rubloff and M. Anderle, “Physico-chemical and biological characterization of deposited polysaccharide chitosan films as a platform for living cells in BioMEMS systems”;IVC-16/ICSS-12/NANO-8, Venice, Italy, June 28 – July 2, 2004

    12. L. Ling, X. Hua, X. Li, G. S. Oehrlein, E. A. Hudson, P. Lazzeri and M. Anderle, “Investigation of Surface Modifications of 193 nm and 248 nm Photoresist Materials During Low-Pressure Plasma Etching”; 31st IEEE International Conference On Plasma Science, ICOPS 2004re, MD, June 28 - July 1, 2004

    13. X. Hua, C. Stolz, and G. S. Oehrlein,P. Lazzeri, N. Coghe, M. Anderle, C. K. Inoki, T. S. Kuan and P. Jiang, “Plasma-Surface Interactions of Nanoporous Silica During Plasma-Based ttern Transfer Using C4F8 and C4F8/Ar Gas Mixtures”; 31st IEEE International Conference On Plasma Science, ICOPS 2004timore, MD, June 28 - July 1, 2004.

    14. G. Gottardi, N. Laidani and M. Anderle, “Ion-induced effects on a-C:H film growth in a PACVD process with CH4-CO2 mixture: a mechanical and structural study“; IVC-16/ICSS-12/NANO-8, Venice, Italy, June 28 – July 2, 2004.

    15. P. Lazzeri, M. Anderle, X. Hua, E. Iacob, C. K. Inoki, P. Jiang, T. S. Kuan, and G. S. Oehrlein, “Chemical and morphological characterization of nanoporous silica low-k dielectrics etched in fluorocarbon plasmas”; IVC-16/ICSS-12/NANO-8, Venice, Italy, June 28 – July 2, 2004.

    16. G. Gottardi, N. Laidani, R. Bartali, M. Filippi, L. Calliari, R.S. Brusa, S. Mariazzi, C. Macchi and M. Anderle, “Amorphous carbon films PACVD in CH4–CO2 under pulsed and continuous substrate bias conditions”; 15th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides & Silicon Carbide (Diamond 2004), Riva del Garda (I), 12-17 September 2004.

    17. S. Forti, C. Pederzolli, R. Canteri, M. Vinante, L. Vanzetti, L.Pasquardini, G. Gensini, S. Pascale and M. Anderle, “Plasma protein adsorption and platelet adhesion on cardiovascular materials: role of morphological and chemical properties in their hemocompatibility”; Presented at “Advances in tissues engineering and biology of heart valves“, Florence (I), September 15-18, 2004

    18. P. Lazzeri, G.W. Rubloff, G. Oehrlein, R.M. Briber, H.-C. Kim, J. Wolf, M. Bersani and M. Anderle, “ToF-SIMS characterization of low-k dielectrics: from materials development to key integration issues in ULSI technology“; 4th European Workshop on Secondary Ion Mass Spectrometry, SIMS Europe 2004, Muenster (G), September 26-29, 2004.

    19. X. Hua, T. Kwon, R. Phaneuf, G. S. Oehrlein, P. Lazzeri, M. Anderle, P. Jiang, C. K. Inoki and T. S. Kuan, “Instabilities of Nanoporous Silica (NPS) During Plasma-Based Pattern Transfer and Subsequent Resist Stripping”, AVS 51st International Symposium, Anaheim, CA, November 14-19, 2004.

    20. R.Canteri, C.Pederzolli, L.Lunelli, P.Villani, L.Pasquardini, M.Vinante, G.Speranza, S.Forti, M.Anderle, J.J.Park and G.W.Rubloff, “Development and characterization of RGD peptide coatings for cell adhesion”, AVS 51st International Symposium, Anaheim, CA, November 14-19, 2004