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    Talks 1-20 21-40 41-60 61-80 81-100 101-126

     

    1. M.Bersani, L.Moro, R.Canteri, M.Anderle, C.Savoia, A.Losavio, G.Queirolo; “SIMS in the microelectronics process and technology: an example of effective cooperation”; XIII Italian Vacuum Society National Symposium, Milano (I), February 14-16, 1996.

    2. M.Anderle; “In situ diagnostic and control of CVD deposition and chemical etching”; XIII Italian Vacuum Society National Symposium, Milano (I), February 14-16, 1996.

    3. M.Anderle, R.Canteri, S.Ferrari and G.Speranza; "Structural characterization of Langmuir-Blodgett (LB) films by Time of Flight (TOF) Sims and Xps"; 43rd National Symposium of the American Vacuum Society. Philadelphia (PE), October14-18, 1996.

    4. M.Surendra, C.R.Guarnieri and M.Anderle; "Rf sensors for plasma process monitoring"; 49th Annual Gaseous Electronic Conference. Argonne (Il), October 20-24, 1996.

    5. A.Cricenti, R.Generosi, M.A.Scarselli, P.Perfetti, P.Siciliano, A.Serra, A.Tepore, L.Vanzetti M.Anderle and C.Coluzza; "Spectromicroscopy applied to the characterization of Pt-SnO2 thin films for gas sensors"; CNR-GNSM 21st Annual Meeting on Advances in Surface and Interface Physics.; Modena (I), December 1996.

    6. R.Rella, P.Siciliano, M.Di Giulio, L.Vanzetti, M.Anderle, A.Cricenti, R.Generosi, C.Coluzza; “Vanadium oxide based gas sensors: morphological, chemical and electrical characterization”, 11th European Conference on Solid-State Transducers –Eurosensors XI-, Warsaw, PL, September 21-24, 1997.

    7. R.Canteri , C.Malacarne, A.Rigo, F.Vianello, L.Zennaro, M.Scarpa, and M.Anderle; “Characterization of functional films on solid substrates by TOF-SIMS"; Secondary Ion Mass Spectrometry (SIMS XI) International Conference.; Orlando (FL), September 7-12, 1997.

    8. M.Bersani , M.Fedrizzi, M.Ferroni, G.Savoia and M.Anderle; “Quantitative SIMS depth distribution of nitrogen in Nitridated Oxide at the SiO2/Si interface"; Secondary Ion Mass Spectrometry (SIMS XI) International Conference; Orlando (FL), September 7-12, 1997.

    9. M.Bersani, M.Fedrizzi, M.Sbetti and M.Anderle; “ULSI Technology and Materials: Quantitative answers by combined mass spectrometry surface techniques”; 1998 International Conference on Characterization and Metrology for ULSI Technology; Gaithersburg (MD) USA, March 23-27, 1998

    10. M.Sbetti, M.Bersani, M.Fedrizzi, S.a Beccara and M.Anderle; “Dopant redistribution analysis in TiSi2/Si systems by SIMS”; 1998 International Conference on Characterization and Metrology for ULSI Technology; Gaithersburg (MD) USA, March 23-27, 1998

    11. M.Bersani , M.Sbetti and M.Anderle; “A comparison between mass spectrometry techniques on oxynitrides"; 2nd French-Italian Symposium on SiO2 and Advanced Dielectrics; L'Aquila, June 15-17, 1998.

    12. M.Bersani , L.Vanzetti, M.Sbetti and M.Anderle; “Characterization of RTP Oxynitrides by SIMS and XPS analyses"; 14th International Vacuum Congress (IVC-14). Birmingham (UK), 31 August-4 September, 1998.

    13. G.Speranza, N.Laidani, L.Calliari and M.Anderle; "Effect of Si on the electronic structure of sputter-deposited C film: an electron spectroscopy study"; Diamond 1998 International Conference. Creta, September 13-18, 1998.

    14. E.Paparazzo, L.Moretto, M.Bersani, M.Fedrizzi and M.Anderle; "Surface analysis studies of Bidri archaeomaterials from the collection of British Museum"; AVS 45th International Symposium. Baltimore (MD), November 2-6, 1998.

    15. M.Anderle, N.Laidani, N.Nefedov and V.Micheli; “Chemical and structural properties of Zirconia-Carbon Films”; 11th International Conference on Thin Films, Cancun, Mexico, August 30-September 3, 1999.

    16. M.Bersani , M.Sbetti, L.Vanzetti and M.Anderle; “Furnace and RTP nitridation of ultrathin oxide films by NO and N2O: Sims and Tof-Sims characterization"; Secondary Ion Mass Spectrometry (SIMS XII) International Conference; Brussels (Belgium), September 5-11, 1999.

    17. M.Sbetti, M.Bersani, L.Vanzetti, R.Canteri and M.Anderle; “Sub-keV Mass Spectrometry analyses on thin oxynitride films "; Secondary Ion Mass Spectrometry (SIMS XII) International Conference; Brussels (Belgium), September 5-11, 1999.

    18. M.Bersani, R.Canteri, V.Micheli, M.Sbetti, L.Vanzetti and M.Anderle; “Which colour?"; Secondary Ion Mass Spectrometry (SIMS XII) International Conference; Brussels (Belgium), September 5-11, 1999.

    19. R.Canteri, G.Speranza, M.Anderle, S.Turri, S.Radice and T.Trombetta; “Characterization of perfluoropolyether-urethane coating by Tof-SIMS and XPS"; Secondary Ion Mass Spectrometry (SIMS XII) International Conference; Brussels (Belgium), September 5-11, 1999.

    20. G.Speranza, N.Laidani, L.Calliari, and M.Anderle; “Towards a quantitative evaluation of the sp2/sp3 ratio in C-based systems”; Diamond ’99 Conference, Prague, 13-17 September 1999